EMS TURBO SPUTTER PDF

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The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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A chromium Cr target is fitted as standard. Stage rotation speed variable between 8 and 20rpm. The target to stage height is variable between 0 mm and 42 mm for the standard stage.

Including oscillator, feed-through, quartz crystal holder and quartz crystals. NanoSurface Cytostretcher Cell Stretcher. The EMS T T Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation.

The platform has six specimen stub positions for 6. All are s;utter, drop-in style no screws and are height adjustable except for the rotary planetary stage. Large-Chamber-Rotary-Pumped Sputter Coater, fitted with three sputtering heads to ensure even metaldeposition.

Turbo-Pumped Sputter Coater, EMST S – Science Services

Operating crystal frequency is in the 5 MHz to tuebo operating range. A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

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Users can rapidly tubo the chamber, if necessary, to avoid cross contamination of sensitive samples. The KX was a digitally-controlled, large chamber sputter coater, ideally suited for SEM sptter other metal coating applications. Rotation Speed Max 38 rpm Min 14 rpm. View Cart Request a Catalog. Includes a gear box to allow the optional FTM to be used.

Rotating specimen stage for glass microscope slides up to two x 75 mm x 25 mm slides. The KX Semi-automatic Carbon Coater was a semi-automatic version of the KX with manual control of the shutter operation, and also fitted with a static specimen stage.

Extended height vacuum chamber mm high — the standard chamber is mm high. For increased source to specimen distance and for coating larger specimens.

The EMS R T is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple smaller specimens. Overview Platforms Workstations Isolation Platforms.

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For replacement sputtering targets see: A “dry” alternative to the standard oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter. For increased source to sample distance and for coating large specimens. Can be fitted to protect large surfaces in the chamber from coating deposition — easily removable for ease of cleaning. For target details see: Variable tilt angle, rotary planetary specimen stage, 50mm diameter rotational speed rpm.

Pioneering annular head sputter coater developed by Polaron. In addition the quality of the resulting carbon films is enhanced by the eradication of “sparking” which is a common problem with less advanced coating systems.

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The EMS T D Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. The stage includes two masks for improving uniformity of coating.

Includes two spare quartz crystals. Stage rotation speed is variable between preset limits. For sputtering target details see: Full range, active vacuum gauge capable of measurement over the range of mbar to 5 x 10 -9 mbar.

When used with the extended height cylinder optional accessory the target to stage height would be an additional 87 mm. Careful evaporation allows precise control of carbon thickness with or without the optional film thickness monitor. Note that EMS recommends 3. Integrated full range gauge assembly for high vacuum measurement.

Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control. For carbon supplies see: Pulsed and ramped carbon rod recipes are supplied as standard.

Other optional targets are available:. Has six stub positions for 15 mm or 6. Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS T D Plus when bench depth is limited. Supplied with pack of 10 tungsten specimen baskets. NanoSurface Cytostretcher Cell Stretcher. Sputer are easy-change, drop-in style no screws and are height adjustable except the rotary planetary stage.